JPH0740520Y2 - イオン注入用プラテン - Google Patents
イオン注入用プラテンInfo
- Publication number
- JPH0740520Y2 JPH0740520Y2 JP1990074133U JP7413390U JPH0740520Y2 JP H0740520 Y2 JPH0740520 Y2 JP H0740520Y2 JP 1990074133 U JP1990074133 U JP 1990074133U JP 7413390 U JP7413390 U JP 7413390U JP H0740520 Y2 JPH0740520 Y2 JP H0740520Y2
- Authority
- JP
- Japan
- Prior art keywords
- platen
- ion implantation
- temperature
- wafer
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005468 ion implantation Methods 0.000 title claims description 31
- 238000001816 cooling Methods 0.000 claims description 23
- 239000003507 refrigerant Substances 0.000 claims description 16
- 230000017525 heat dissipation Effects 0.000 claims description 6
- 239000002826 coolant Substances 0.000 description 17
- 230000000694 effects Effects 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 6
- 230000005494 condensation Effects 0.000 description 5
- 238000009833 condensation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005679 Peltier effect Effects 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005658 nuclear physics Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990074133U JPH0740520Y2 (ja) | 1990-07-11 | 1990-07-11 | イオン注入用プラテン |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990074133U JPH0740520Y2 (ja) | 1990-07-11 | 1990-07-11 | イオン注入用プラテン |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0433651U JPH0433651U (en]) | 1992-03-19 |
| JPH0740520Y2 true JPH0740520Y2 (ja) | 1995-09-20 |
Family
ID=31613562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990074133U Expired - Lifetime JPH0740520Y2 (ja) | 1990-07-11 | 1990-07-11 | イオン注入用プラテン |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740520Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6434752U (en]) * | 1987-08-26 | 1989-03-02 |
-
1990
- 1990-07-11 JP JP1990074133U patent/JPH0740520Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0433651U (en]) | 1992-03-19 |
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